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Engineering horizons
Sputter ion pumps.
Author(s)
L. Bonmassar
Varian SPA, V. Varian 54, 10040 Leini (To), Italy
M. Busso
Varian SPA, V. Varian 54, 10040 Leini (To), Italy
S. P. A. Varian
Varian SPA, V. Varian 54, 10040 Leini (To), Italy
Abstract
A review of the development of ion pumps, their operating principles is presented along with description of particular designs. The performance of ion pumps when used for various gases, their range of operation and fields of application are elaborated.
Publication Details
Page(s)
33-40
DOI
DOI not available
Published
Journal: Engineering horizons, Volume: 23, Issue: 260, Year: 2010
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