Abstract:
Thin films of zirconium oxide were deposited on injection molded stainless steel substrates via direct sputtering using yttria stabilized zirconia target under controlled temperature and environment conditions. The films thus obtained were characterized for their structure, grain size and wear properties. The deposited films, about 1 µm in thickness, were found to have a predominantly tetragonal structure with grain size of about 5 nm. The films were also heat treated to investigate the stability of phases and changes in tribological properties. It has been shown that thin-film zirconia -coatings with stable structure, good adhesion and very low friction coefficient could be produced using appropriate sputtering and post heat treatment parameters.
Page(s):
33-40
DOI:
DOI not available
Published:
Journal: Proceedings of 4th International Bhurban Conference on Applied Sciences and Technology, Volume: 0, Issue: , Year: 2005